Speakers
Description
Abstract: We propose a novel 3D detector with a concentric ring electrode configuration. Multiple columnar collecting electrodes are evenly distributed in the annular region between the central columnar electrode and the outermost annular trench electrode. The small potential saddle points generated between adjacent collection electrodes naturally isolate the signal. The annular trench electrode and the cylindrical trench electrode are alternately distributed to optimize the electric field distribution in the 3D detector, and the detection dead zone can be reduced by adjusting the electrode spacing. In this work, device simulation data from TCAD was used to investigate the X-ray incident response characteristics of the novel sensor after adjusting structural parameters, including electric field and potential distribution, transient induced current, and charge collection efficiency (CCE). We found that the device can withstand voltages in excess of 1,000 V without breakdown, has high reliability, and is fully depleted at a bias voltage of 67 V with low power consumption. The thicker substrate thickness enables efficient collection of 1-10 keV X-rays with a response time of less than 20 ns and a peak CCE at about 300 V.
Keywords: 3D Sensor with Concentric Ring Structure; X-ray incidence; Charge Collection Efficiency (CCE); Response time; Breakdown voltage