The 14th international "Hiroshima" Symposium on the Development and Application of Semiconductor Tracking Detectors (HSTD 14)

Details for Javier Fernandez Tejero

Affiliation: Instituto de Microelectrónica de Barcelona (IMB-CNM, CSIC)

Author in the following contribution

• Monolithic integration of cooling microchannels in silicon wafers with BEOL layers